Class Schedule

MT240 RF Plasma Systems

Campus contacts

Covers the theory and practice of RF (Radio Frequency) plasma systems as used in semiconductor manufacturing processes such as etching, chemical vapor deposition (CVD) and sputter deposition. Includes plasma physics, RF power system components, power matching and match circuits, and applications in semiconductor manufacturing. Prerequisite: MT 112A or MT 112, MT 223, CH 100 or higher, WR 227, or instructor permission. Audit available. (See course content and outcomes.)

Credits: 3

List of classes for MT240 RF Plasma Systems
CRNClass typeLocationDays & timeDatesSeats availableFacultyMore info
10162In-person labRock Creek BLDG7 231
Monday
from 11am to 1:50pm
From January 6 through March 22, 2025
Eric J KirchnerBooks for CRN 10162
Class details for CRN 10162
Fees: $12
and In-person lectureRock Creek BLDG7 231
Tuesday
from 12 to 1:50pm
From January 6 through March 22, 2025
12008In-person lectureRock Creek BLDG7 231
Friday
from 9 to 10:50am
From January 6 through March 22, 2025
Eric J KirchnerBooks for CRN 12008
Class details for CRN 12008
Fees: $12
and In-person labRock Creek BLDG7 231
Thursday
from 9 to 11:50am
From January 6 through March 22, 2025

Class schedule definitions

Cost:
cost is based on the number of credits – see tuition and fees
Books:
$0 or <$40 means low cost books (doesn't include other supplies like calculators)
Register:
use the CRN to register in MyPCC – see how to register
Class types:
see more about class types
  • In-person: classes take place at specific times and locations. Attendance in person is required.
  • Online: classes do not have meeting times. Regular online interaction is required and there are weekly assignments.
  • Remote: classes take place at specific times online. Students must be logged in during class meeting times.
  • In-person and remote: classes meet both in-person and remotely. Attendance at both is required.
  • In-person and online: classes meet in-person with additional online activities required.
  • Remote and online: classes meet remotely with additional online activities required.